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4H-SiC Line
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AFM
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ALD
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Auger Nanoprobe
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Cathodo-luminescence
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CMP
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Electrical Characterisation
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ESEM
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FIB-SEM
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FlexiFab Clean Room
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GaN-IC MPW
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Graphene FET
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HAXPES Spectrometer
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KPFM
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Photoluminescence (PL)
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PhoxLab
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Physical & Failure Analysis
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Physical Vapour Deposition (PVD)
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PiezoMEMS
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Scanning Electron Microscope
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SIMS
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TEM
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ToF-SIMS
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Wafer-level Prober
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XPEEM Spectro-microscope
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