Wafer-level Electrical Measurement
The Cascade Elite 300M is equipped with 8 manual probes for a maximum flexibility and capable to probe pads down to 25µm size. It has the option to use a probe card with up to 40 contacts. It is connected over a switching matrix to a semiconductor characterization system (Keithley SCS 4200) which is equipped with preamplifiers and a CV measurement option. Additionally an Electrometer (High resistance meter) is available.
The probing Station can handle wafer of any size up to 300mm and even wafers/chips on dicing frame. The chuck can be heated up to 310°C.
CV-Measurement; IV-Measurement; Device characterization
|4× 4200-SMU||Medium Power Source-Measure Unit||±210 V, ±100 mA||0.2µV, 100 fA|
|1× 4210-SMU||High Power Source-Measure Unit||±210 V, ±1 A||0.2µV, 100 fA|
|2× 4200-PA||Remote Preamplifier||0.2µV, 10 aA|
|1× 4210-CVU||Capacitance-Voltage Unit||1 kHz – 10 MHz ±30 V|
|4225-PMU||Ultra-Fast Pulse I-V Unit||±40 V, ±10V||75 nA|
- Nano for Quantum Technologies
- Disruptive Devices
- Advanced Integration
Key Enabling Capability
- Metrology / Characterisation: Electrical
Electrical test of wafers or chip arrays.