ESEM

A highly versatile scanning electron microscope that is used to chemically and structurally characterise the surface of samples. Special operation modes allow the characterisation of non-conductive or humid materials and imaging in a temperature range of -20 to 1500°C.

Environmental Scanning Electron Microscope

Quanta 650 is a highly versatile environmental scanning electron microscope (ESEM) that is able to operate under high vacuum, low vacuum and extended vacuum (ESEM) conditions, enabling the characterisation of uncoated samples in their original state. It operates with a Schottky field emission gun that provides high beam intensity and stability. The electron acceleration voltage ranges from 1 to 30 kV.


Specifications

  • Voltage: 1–30kV
  • SEM imaging with a resolution of about 1nm at 30kV
  • Low vacuum/Environmental SEM Imaging of uncoated materials
  • Cooling/Heating stage (in-situ): -20°C to 1500°C
  • SE/BSE/EDXS detectors (Topographical/Structural analysis/Chemical analysis)
  • Large chamber that can hold samples of up to 25cm in diameter
  • A multi-holder allows loading of up to 16 samples simultaneously

Ascent+ facility
INL

Platform Technologies

  • Nano for Quantum Technologies
  • Disruptive Devices
  • Advanced Integration

Key Enabling Technologies

  • Metrology/Characterisation: Physical characterisation

Case Study

A user needs to monitor the device after each fabrication step. The characterisation of samples can be performed without prior modification (such as coating), even if they are non-conductive. High throughput of different samples is achieved as up to 16 samples, e.g., after different fabrication steps, can be loaded simultaneously.

Key Enabling Capability

Metrology / Characterisation

Platform Technology

Advanced Integration, Disruptive Devices, Nano for Quantum Technologies

Facility

INL