AFM

State of the art AFM measurement system. Capable of measuring samples up to 300mm wafer size.

Atomic Force Microscope

The NX20 300mm provides recipe-automated AFM measurement for numerous applications providing advanced measurements and analysis of samples at the nanoscale. With the ability to measure roughness, height and depth, perform defect reviews, property characterization, and nanomechanical property imaging, the AFM is ideally suited to a wide range of tasks performed by FA, QA, and QC engineers that work with large samples.


Specifications

  • XY scanner: 100µm×100µm
  • XY travel range: 300mm×300mm
  • Z travel range: 25mm
  • Focus travel range: 8mm
  • 100, 150, 200, 300mm wafers
  • Small sample magnetic sample holder up to 20mm thickness

Ascent+ facility
Fraunhofer-IZM

Platform Technologies

  • Nano for Quantum Technologies
  • Disruptive Devices
  • Advanced Integration

Key Enabling Technologies

  • Metrology / Characterisation: Physical and Mechanical

Key Enabling Capability

Metrology / Characterisation

Platform Technology

Advanced Integration, Disruptive Devices, Nano for Quantum Technologies

Facility

Fraunhofer Mikroelektronik