Description
Atomic Force Microscope
The NX20 300mm provides recipe-automated AFM measurement for numerous applications providing advanced measurements and analysis of samples at the nanoscale. With the ability to measure roughness, height and depth, perform defect reviews, property characterization, and nanomechanical property imaging, the AFM is ideally suited to a wide range of tasks performed by FA, QA, and QC engineers that work with large samples.
Specifications
- XY scanner: 100µm×100µm
- XY travel range: 300mm×300mm
- Z travel range: 25mm
- Focus travel range: 8mm
- 100, 150, 200, 300mm wafers
- Small sample magnetic sample holder up to 20mm thickness
Ascent+ facility
Fraunhofer-IZM
Platform Technologies
- Nano for Quantum Technologies
- Disruptive Devices
- Advanced Integration
Key Enabling Capability
- Metrology / Characterisation: Physical and Mechanical
