Description
An SEM is an electron microscope that produces images of a sample by scanning the surface with a focused beam of electrons. The electrons interact with atoms in the sample, producing various signals that contain information about the surface topography and composition of the sample.
The configuration in FIB-SEM systems is such that the electron and ion beam focal points coincide, which results in the optimisation of many applications. It enables simultaneous SEM imaging during FIB milling tasks, which is perfect for TEM lamella preparation.
Keywords
SEM, FIB, EDX, EBSD, ToF-SIMS
Specifications
- Tescan Solaris FIB/SEM
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- Excellent ultra-high resolution SEM imaging
- High precision nanopatterning engine for electron and ion beams
- Multi-gas injection system with a variety of precursor gases
- Substrates: up to ∅200 mm wafers
- Tescan Amber X FIB/SEM/EDX/EBSD/ToF-SIMS
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- Large area FIB processing up to 1mm
- Ga-free microsample preparation
- Ultra-high resolution, field-free FEG-SEM imaging and analysis
- Substrates: up to ∅200mm wafers
- EDX: Oxford Aztec UltiMax 170 EDX elemental analysis system
- EBSD: Oxford Symmetry Electron Backscatter Spectroscopy
- ToF-SIMS: Tofwerk Time of Flight Secondary Ion Mass Spectroscopy
- FEI Quanta 650
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- High resolution imaging at high and low voltage in high vacuum: 1.2nm @ 30 kV and 2.9nm @ 1 kV with SE detector
- Elemental Analysis (EDS): Oxford Instruments X-MAX 20 large area Si diffused detector for high productivity during analysis
- Sample size up to 6” wafers.
- Carl Zeiss Supra 40
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- High resolution imaging at high and low voltage in high vacuum: 1.3 nm @ 15 kV
- 2.1 nm @ 1 kV with SE detector, In-lens detector, Backscatter detector and STEM detector
- STEM mode with BF and HAADF detectors (0.8 nm resolution)
- Elemental Analysis (EDS): Oxford Instruments X-MAX 50 large area Si diffused detector for high productivity during analysis
- Sample size up to 45×45mm
Ascent+ facility
Tyndall
Platform Technologies
- Nano for Quantum Technologies
- Disruptive Devices
- Advanced Integration
Key Enabling Capability
- Metrology / Characterisation: Physical characterisation
Case Study
A researcher is working on surface-enhanced Raman scattering/spectroscopy (SERS). A noble metallic nano-surface is required for SERS substrate. Using physical characterisation (SEM/TEM and FIB) both the cross-section and surface of the fabricated 2D gold nanoparticle array are investigated. The results provide information on the diameter and topography of the Au nano-balls. The deposition process is then optimised to obtain the required optical behaviour. [Click here for more details]
