Scanning Electron Microscope

A scanning electron microscope (SEM) is an electron microscope that produces images of a sample by scanning the surface with a focused beam of electrons. The electrons interact with atoms in the sample, producing various signals that contain information about the surface topography and composition of the sample.

Description

A scanning electron microscope (SEM) is a type of electron microscope that produces images of a sample by scanning the surface with a focused beam of electrons. The electrons interact with atoms in the sample, producing various signals that contain information about the surface topography and composition of the sample.


Specifications

FEI Quanta 650
  • High resolution imaging at high and low voltage in high vacuum: 1.2nm @ 30 kV and 2.9nm @ 1 kV with SE detector
  • Elemental Analysis (EDS): Oxford Instruments X-MAX 20 large area Si diffused detector for high productivity during analysis
  • Sample size up to 6” wafers.
Carl Zeiss Supra 40
  • High resolution imaging at high and low voltage in high vacuum: 1.3 nm @ 15 kV
  • 2.1 nm @ 1 kV with SE detector, In-lens detector, Backscatter detector and STEM detector
  • STEM mode with BF and HAADF detectors (0.8 nm resolution)
  • Elemental Analysis (EDS): Oxford Instruments X-MAX 50 large area Si diffused detector for high productivity during analysis
  • Sample size up to 45×45mm

Ascent+ facility
Tyndall

Platform Technologies

  • Nano for Quantum Technologies
  • Disruptive Devices
  • Advanced Integration

Key Enabling Technologies

  • Metrology / Characterisation: Physical characterisation

Case Study
A researcher is working on surface-enhanced Raman scattering/spectroscopy (SERS). A noble metallic nano-surface is required for SERS substrate. Using physical characterisation (SEM/TEM and FIB) both the cross-section and surface of the fabricated 2D gold nanoparticle array are investigated. The results provide information on the diameter and topography of the Au nano-balls. The deposition process is then optimised to obtain the required optical behaviour. [Click here for more details]

Additional information

Key Enabling Capability

Metrology / Characterisation

Platform Technology

Advanced Integration, Disruptive Devices, Nano for Quantum Technologies

Facility

Tyndall