Survey spectrum and Hf 4f, Hf 3d5/2 et Ti 2p core levels measured for the Pt (5 nm)/Ti (5 nm)/HfO2 (10 nm)/TiN (35 nm)/Si stack with the Cr Kα (5.4 keV) source at 45° et 90° take-off angles

Survey spectrum and Hf 4f, Hf 3d5/2 et Ti 2p core levels measured for the Pt (5 nm)/Ti (5 nm)/HfO2 (10 nm)/TiN (35 nm)/Si stack with the Cr Kα (5.4 keV) source at 45° et 90° take-off angles