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Thursday 23th June 2022, 15:00 CEST (UTC+2)
Advanced Characterisation Techniques
Adeline Grenier (CEA-Leti)

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Abstract/Summary

Advanced Characterisation Techniques, Adeline Grenier (CEA Leti)
The field of semiconductors (SC) has grown exponentially for the past decades. They can now be found in a multitude of operating devices. The efficiency and physical properties of SC devices often rely on active regions at nanometre scale. Consequently, the use of advanced characterisation techniques is required to provide information to understand and enhance the performances of devices from growth to device integration.
Atom probe tomography (APT) has shown to be a powerful tool to achieve three-dimensional compositional information at nanometer scale. APT has emerged as a valuable tool in the study semiconductors field. In optoelectronics, it has provided insights into the nanostructure of light emitting diodes (LEDs), laser diodes and microwires. In nano-electronics, it has allowed insights into doping and alloying effects in transistors. Coupled with other spectroscopy (cathodoluminescence, photoluminescence), microscopy (transmission electron microscopy) and theoretical modelling, the availability of three-dimensional compositional information of semiconductor devices based on the APT data has had (and will continue to have) a profound impact on the design and development of devices.
Adeline Grenier
Adeline obtained her PhD in 2008 at Groupe de Physique des Matériaux, Rouen on physical and chemical investigation of magnetostrive multilayers. She joined CEA in 2009 (Commissariat à l’énergie atomique et aux énergies alternatives) on the nanocharacterisation platform as a postdoc researcher and then researcher-engineer. So far, she characterises technological objects that are developed at CEA-Leti, using atom probe tomography (APT) and transmission electron microscopy (TEM). She is strongly involved in methodology developments that APT, TEM and optical spectroscopy for a deeper understanding of III-N materials. Her research covers also many domains in nanoelectronics: lightening, optoelectronics, microelectronics, memories …