Zygo System / White Light Interferometer


White Light Interferometer

Laser interferometer enable precise non-contact surface measurement and characterisation of micro- and nano-scale surface features (e.g. roughness, step height measurements, bending profiles of MEMS devices, etc.).

Interferometer, surface, nanoscale, pysical characterisation

Model: Zygo System
Wafer size: Prepared samples only
Temperature Range: Room Temperature
Fully Automated: Single sample only
RF on Wafer characterisation: No

Ascent+ facility

Platform Technologies

  • Nano for Quantum Technologies
  • Disruptive Devices

Key Enabling Capability

  • Metrology / Characterisation: Physical characterisation

Case Study

A PhD student is developing a new family of low power optical interconnects such as modulators lasers and photo-detectors using photonic crystals patterned on deposited silicon. A thick layer of amorphous silicon is deposited using LPCVD and then annealed in forming gas, which transforms the amorphous silicon into polycrystalline silicon. High quality optical resonators are difficult to achieve due to the high surface roughness of polycrystalline silicon (~10nm). They use Chemical-Mechanical Polishing to produce a smooth and uniform poly:Si. The interferometer is used to characterise the surface roughness, which is in the sub-nanometre range.

Additional information

Key Enabling Capability

Metrology / Characterisation

Platform Technology

Disruptive Devices, Nano for Quantum Technologies