Description
MOVPE of III-V materials (specifically GaAs-AlGaAs heterostructures)
The EPN group at Tyndall runs one of the purest III-V MOVPE reactor in the world, as proven by record quantum well linewidths. The double reactor is an Aixtron 200 accepting one 2″ wafer, or three 2″ wafers. A suite of characterization tools (XRD, AFM, Photoluminescence, ECV profiling, Hall measurements) allow full characterisation of the structures grown.
Keywords
MOVPE, 2″ wafers, high purity material, GaAs QWs
Specifications
MOVPE Aixtron 200: both single 2″ wafer reactor and 3×2″ wafer reactor
Ascent+ facility
Tyndall
Platform Technology
- Nano for Quantum Technologies
Key Enabling Capability
- Processing: Nanoscale growth
Publication
Record quantum well linewidth demonstrated repeatedly:
[DOI: 10.1016/j.jcrysgro.2010.07.021]
