MOVPE of III-V materials (specifically GaAs-AlGaAs heterostructures)
The EPN group at Tyndall runs one of the purest III-V MOVPE reactor in the world, as proven by record quantum well linewidths. The double reactor is an Aixtron 200 accepting one 2″ wafer, or three 2″ wafers. A suite of characterization tools (XRD, AFM, Photoluminescence, ECV profiling, Hall measurements) allow full characterisation of the structures grown.
MOVPE, 2″ wafers, high purity material, GaAs QWs
MOVPE Aixtron 200: both single 2″ wafer reactor and 3×2″ wafer reactor
- Nano for Quantum Technologies
Key Enabling Capability
- Processing: Nanoscale growth
Record quantum well linewidth demonstrated repeatedly: