imec Offer

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Access to Silicon Bulk FinFET Technology

Device Analysis
Electrical Characterization Capabilities
Test chips documentation and data (Virtual Access)
  • FinFET and GAA
  • III/V InGaAs GAA
  • PLANAR
Scientific & technical support

Material for Device Analysis

300mm wafers with Bulk FinFET devices
  • 300mm wafers with Bulk FinFET devices
  • Silicon EPI nFET/pFET CMOS fully integrated vehicle
  • Embedded Si:P / SiGe S/D CMOS fully integrated vehicle
  • Replacement Metal Gate [RMG] with Local Interconnect
  • Single level BEOL metal
300mm wafers with Planar Metal Gate devices (28nm)
  • Silicon nFET/pFET CMOS fully integrated vehicle
  • Implanted S/D junctions
  • Replacement Metal Gate [RMG] with Local Interconnect
  • Single level BEOL metal





Gate and RMG N14 Integrated Vehicle Local Interconnect

  • Digital and Analog/RF existing test chips
  • Complete suite of test structures for Reliability/ESD/Matching/Local Layout effects/…
  • Standard devices up to circuit level [Ring-Oscillators, …]
  • State-of-the-art bulk FinFET device baseline




STD Test-chip Content Testchip Documentation
and Simulation
State-of-the-Art Device

  • SPICE models and model cards for digital
  • SPICE models for Layout effect

Electrical Characterization Capabilities

    Available systems and methods:

    • >500 m2 of test labs, ~25 semiauto/manual 300mm probers
    • Statistical data treatment in JMP
    • Fully automatic 300mm parametric testers
    • Semiautomatic 300mm parametric testers
    • Temperature range for test on wafers 77/10K ⇒ high T
    • Fast Pulse testing, Self-Heating characterization
    • HF tests up to 50 GHz
    • Noise measurements
    • Reliability tests: hot carriers, TDDB, charge pumping, …
    • High power tests (10kV, >100A) on 300mm prober
    • Electrostatic discharge LAB




    Semiauto tester 300mm chuck with T capability Full Auto tester 300mm chuck with T capability RF semiauto 300mm tester

    Scientific & technical support

    Whenever necessary and upon request of the User, imec can offer scientific support for in-depth data interpretation.